Seiler, D.
, Diebold, A.
, McDonald, R.
, Ayre, C.
, Khosla, R.
, Zollner, S.
and Secula, E.
(2005),
Characterization and Metrology for ULSI Technology: 2005, American Institute of Physics, Melville, NY
(Accessed October 31, 2024)
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Characterization and Metrology for ULSI Technology: 2005
Published
Author(s)
, Alain C. Diebold, Robert McDonald, Caroline Ayre, Rajinder P. Khosla, Stefan Zollner,
Citation
Characterization and Metrology for ULSI Technology: 2005
Volume
788
Publisher Info
American Institute of Physics, Melville, NY
Pub Type
Books
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created September 28, 2005, Updated January 27, 2020