Germer, T.
and Fasolka, M.
(2003),
Characterizing Surface Roughness of Thin Films By Polarized Light Scattering, ed. by A. Duparr {?} and B. Singh, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies , San Diego, CA
(Accessed July 18, 2024)
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Characterizing Surface Roughness of Thin Films By Polarized Light Scattering, ed. by A. Duparr {?} and B. Singh
Published
Author(s)
, M J. Fasolka
Proceedings Title
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Conference Dates
August 3, 2003
Conference Location
San Diego, CA
Conference Title
Proc. SPIE 5188
Pub Type
Conferences
Citation
Issues
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Created January 1, 2003, Updated February 17, 2017