Soles, C.
, Lin, E.
, Wu, W.
, Lin, Q.
and Angelopoulos, M.
(2001),
Confinement Induced Deviation in Ultra-thin Photoresist Films, Proceedings of the 12th International Conference on Photopolymers, Brookfield, CT, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853792
(Accessed October 31, 2024)