Rim, M.
, Agocs, E.
, Dixson, R.
, Kavuri, P.
, Vladar, A.
and Attota, R.
(2020),
Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy, Journal of Vacuum Science and Technology B, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=928754
(Accessed December 3, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy
Published
Author(s)
Min-Ho Rim, , , , ,
Citation
Journal of Vacuum Science and Technology B
Pub Type
Journals
Download Paper
Keywords
Semiconductor fabrication, contamination, detection, defects, TSOM
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created August 27, 2020, Updated October 12, 2021