Kreider, K.
, Allen, D.
, Chen, D.
, DeWitt, D.
, Meyer, C.
and Tsai, B.
(2001),
Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools, Advanced Thermal Processing of Semiconductors, International Conference | 9th | | IEEE
(Accessed October 31, 2024)