Herman, D.
, Gaitan, M.
and DeVoe, D.
(2001),
MEMS Test Structures for Mechanical Characterization of VLSI Thin Films, Proc., SEM Conference, Portland, OR, US
(Accessed February 10, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
MEMS Test Structures for Mechanical Characterization of VLSI Thin Films
Published
Author(s)
, , Don DeVoe
Proceedings Title
Proc., SEM Conference
Conference Dates
June 4-6, 2001
Conference Location
Portland, OR, US
Conference Title
SEM Conference
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created June 5, 2001, Updated October 12, 2021