Villarrubia, J.
, Vladar, A.
, Ming, B.
, Kline, R.
, Sunday, D.
, Chawla, J.
and List, S.
(2015),
Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library, Ultramicroscopy, [online], https://doi.org/10.1016/j.ultramic.2015.01.004
(Accessed December 4, 2024)