Kramar, J.
, Dixson, R.
and Orji, N.
(2010),
Scanning Probe Microscope Dimensional Metrology at NIST, Measurement Science & Technology
(Accessed January 13, 2025)
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Scanning Probe Microscope Dimensional Metrology at NIST
Published
Author(s)
, ,
Abstract
Scanning probe microscopy (SPM) dimensional metrology efforts at the U.S. National Institute of Standards and Technology are reviewed. The main SPM instruments for realizing the International System of Units (SI) are the Molecular Measuring Machine, the Calibrated Atomic Force Microscope, and the Critical Dimension Atomic Force Microscope. These are optimized for long-distance measurements, three-dimensional measurements over conventional SPM distances, and critical dimension or line width measurements respectively. 10 mm distances have been measured with relative standard uncertainty, u, of 1.5 x 105; step heights at the 100 nm scale have been measured with relative u of 5 x 103; and sub-micrometer line widths have been measured with u = 0.8 nm.Citation
Measurement Science & Technology
Pub Type
Journals
Keywords
SPM, AFM, traceable dimensional metrology, nanometrology, uncertainty budget
Citation
Issues
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Created December 21, 2010, Updated February 19, 2017