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Displaying 1701 - 1725 of 2606

3D Image Correction of Tilted Sample Through Coordinate Transformation

January 1, 2007
Author(s)
Wei Chu, Joseph Fu, Ronald G. Dixson, Theodore V. Vorburger
In scanned probe measurements of micrometer- or nanometer-scale lines, it is nearly impossible to maintain the sample in a perfectly level position, and even a small amount of tilt angle can contribute to the accuracy of the result of measurand such as

A Time-Resolved Kinetic Monte-Carlo Simulation Study On Si (111) Etching

January 1, 2007
Author(s)
Hui Zhou, Joseph Fu, Richard M. Silver
In this paper we have extended the Kinetic Monte-Carlo simulation method to study the etching dynamics of Si (111) surfaces in NH4F in a time-resolved basis. We have examined the step-flow dynamics of Si(111) etching using various simulation window sizes

Calibrated Overlay Wafer Standard

January 1, 2007
Author(s)
Michael T. Stocker, Richard M. Silver, Ravikiran Attota, Jay S. Jun
This document describes the physical characteristics of Standard Reference Material SRM 5000, provides guidance for its use in calibrating overlay (OL) tools, and gives information and precautions concerning its care and handling.Standard Reference

Comparison of Optical and Stylus Methods for Measurement of Rough Surfaces

January 1, 2007
Author(s)
Theodore V. Vorburger, H G. Rhee, Thomas B. Renegar, Jun-Feng Song, Xiaoyu A. Zheng
Abstract Optical methods are increasingly used for measurement of surface texture, particularly for areal measurements where the optical methods are generally faster. A new Working Group under Technical Committee (TC) 213 in the International Organization

Fundamental Limits of Optical Critical Dimension Metrology: A Simulation Study

January 1, 2007
Author(s)
Richard M. Silver, Thomas A. Germer, Ravikiran Attota, Bryan M. Barnes, B Bunday, J Allgair, Egon Marx, Jay S. Jun
This paper is a comprehensive summary and analysis of a SEMATECH funded project to study the limits of optical critical dimension scatterometry. The project was focused on two primary elements: 1) the comparison, stability, and validity of industry models

Helium Ion Microscopy: A New Technique for Semiconductor Metrology and Nanotechnology

January 1, 2007
Author(s)
Michael T. Postek, Andras Vladar, John A. Kramar, L A. Stern, John Notte, Sean McVey
The Helium Ion Microscope (HIM) offers a new, potentially disruptive technique for nano-metrology. This methodology presents an approach to measurements for nanotechnology and nano-manufacturing which has several potential advantages over the traditional

Higher Order Tip Effects in CD-AFM Linewidth Measurements

January 1, 2007
Author(s)
Ndubuisi G. Orji, Ronald G. Dixson
In critical dimension Atomic force microscopy (CD-AFM), a source of uncertainty is the tip. Measurements made using a CD-AFM tip show an apparent broadening of the width. Usually the results can be approximated if the tip-width is known. In addition to tip

Images of Strips On and Trenches In Substrates

January 1, 2007
Author(s)
Egon Marx
The computation of images of lines or strips on a substrate and trenches in a substrate or a layer above a substrate, all made of dielectric or absorbing materials, using integral equations equivalent to Maxwell's equations and using Fourier optics are

Laser Tracker Testing at NIST Using the ASME B89.4.19 Standard

January 1, 2007
Author(s)
Balasubramanian Muralikrishnan, Christopher J. Blackburn, Daniel S. Sawyer, Bruce R. Borchardt, William T. Estler, Steven D. Phillips
While the versatility and economics of laser trackers are quite appealing, the ability to assess their accuracy and to compare various brands has been limited by a lack of a national or international standard that encompasses testing and traceability

Laser Trackers: Testing and Standards

January 1, 2007
Author(s)
Steven D. Phillips
Laser trackers are now the tool of choice for large scale coordinate metrology. They are transportable allowing reconfigurable production facilities at a lower capital cost than large CMMs. Trackers now include absolute distance measuring (ADM) capability

Linewidth Measurement Based on Automatically Matched and Stitched Images

January 1, 2007
Author(s)
Wei Chu, Joseph Fu, Ronald G. Dixson, Theodore V. Vorburger
The emergence of ultra-sharp carbon nanotube (CNT) tips provides a new approach to minimize the distortion of the measured linewidth profile caused by interaction with the fmite probe tip size. However, the inevitable tilt angle resulting from attaching

NIST Standard Bullets and Casings Project

January 1, 2007
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Susan M. Ballou, Thomas Brian Renegar, Li Ma, Eric P. Whitenton, David R. Kelley, Robert A. Clary, A Zheng, M Ols
The National INstitute of Standards and Technology (NIST) standard bullets and casings project will provide support to firearm examiners and to the National Integrated Ballistics Information Network (NIBIN) in the United States. The standard bullet is

Roundness Measurements Using the NIST Fiber Probe

January 1, 2007
Author(s)
Balasubramanian Muralikrishnan, Jack A. Stone Jr., John R. Stoup
We have described a fiber probe for dimensional measurement of micro-holes in the 2004 and 2006 ASPE annual meetings. In this abstract, we describe the adaptation of this probe for measuring roundness of tiny holes and knife edge apertures. In its current

Surface Metrology Algorithm Testing System

January 1, 2007
Author(s)
Son H. Bui, Theodore V. Vorburger
This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a

NIST Handbook 150-18 NVLAP Fasteners and Metals: 2006 Edition

December 22, 2006
Author(s)
Thomas R. Davis
NIST Handbook 150-18 presents technical requirements and guidance for the accreditation of laboratories under the National Voluntary Laboratory Accreditation Program(NVLAP)Fasteners and Metals Program. It is intended for information and use by accredited

Project Team 4, the 2000-2005 Reference Standards Committee of the USP Council of Experts and Its Advisory Panel, USP Staff, Consultant: Official USP Reference Standards: Metrology Concepts, Overview, and Scientific Issues and Opportunities

December 1, 2006
Author(s)
Reenie M. Parris
The United States Pharmacopeia (USP) is a private standards-setting body created in 1820 by practitioners who wished to promote the quality of therapeutic products in commerce. The principal product of USP, then and now, is the United States Pharmacopeia

Evaluation Specimens for Izod Impact Machines (SRM 2115): Report of Analysis

October 1, 2006
Author(s)
Thomas A. Siewert, Jolene Splett, Raymond Santoyo
In the past few years, we have received a number of requests for verification specimens for Izod impact machines, similar to what we offer for Charpy impact machines. Although there are similarities between Izod and Charpy impact testing, there are some
Displaying 1701 - 1725 of 2606