Publications

Displaying 51 - 75 of 216

Electron Microprobe Characterization of Si-Ge Alloys and Films for Use as Microanalysis Reference Materials

October 16, 2008

Author(s)

Ryna B. Marinenko, Shirley Turner, Dale E. Newbury, Robert L. Myklebust, Lee L. Yu, Rolf L. Zeisler, David S. Simons, John A. Small

Bulk SiGe wafers cut from single-crystal boules and SiGe thick films on Si wafers were evaluated with the electron probe microanalyzer for the extent of heterogeneity and composition for use as reference standards needed by the microelectronics industry in

Electron-Excited Energy Dispersive X-Ray Spectrometry at High Speed and at High Resolution: Silicon Drift Detectors and Microcalorimeters

October 16, 2008

Author(s)

Dale E. Newbury

Two recent developments in x-ray measurement technology provide dramatic improvements in analytical x-ray measurement science that will impact the frontiers of electron microscopy. (1) The silicon drift detector (SDD) uses the same measurement physics

Energy Dispersive Spectrometry

October 16, 2008

Author(s)

Dale E. Newbury

Energy dispersive x-ray spectrometry (EDS) is a spectral measurement tool used with a wide variety of excitation sources: electrons, ions and x-ray. Photon measurement is based on photoelectric absorption and conversion into charge. The process is serial

High Precision Multiple keV X-Ray Analysis: Part I. Tests of K-Shell Ionization Cross

October 16, 2008

Author(s)

J T. Armstrong, Dale E. Newbury, Paul Carpenter

To evaluate which models of x-ray emission and ionization cross section give the most accurate results when applied to quantitative x-ray emission measurements, we performed a series of high precision measurements of K-shell x-ray intensities as a function

Improved Performance in Electron-Excited Energy Dispersive X-Ray Spectrometry With the Silicon Drift Detector (SDD): Output Count Rates Above 100 kHz With Application to X-Ray Imaging

October 16, 2008

Author(s)

Dale E. Newbury

Energy dispersive x-ray spectrometry (EDS) is a key characterization method in electron beam instruments: the scanning electron microscope (SEM), analytical electron microscope (AEM), and the scanning transmission electron microscope (STEM). The

Quantitative Electron Probe Microanalysis of Rough Targets

October 16, 2008

Author(s)

Dale E. Newbury

Rough samples with topography on a scale that is much greater than the micrometer dimensions of the electron interaction volume present an extreme challenge to quantitative electron beam x-ray microanalysis with energy dispersive x-ray spectrometry

Report from the NIST-MAS Workshop on The Accuracy Barrier in Quantitative EPMA and the Role of Standards

October 16, 2008

Author(s)

Dale E. Newbury, Ryna B. Marinenko, J T. Armstrong, John A. Small, Eric B. Steel

stract is attached.

Response to a Letter to the Editor of Microscopy and Microanalysis Journal

October 16, 2008

Author(s)

Dale E. Newbury

Response to a letter to the editor of Microscopy and Microanalysis journal from Simon Burgess commenting on my paper Misidentification of Major Constituents by Automatic Qualitative Energy Dispersive X-ray Microanalysis: A Problem That Threatens the

The New X-Ray Mapping: X-Ray Spectrum Imaging Above 100 kHz Output Count Rate With the Silicon Drift Detector

October 16, 2008

Author(s)

Dale E. Newbury

Electron-excited x-ray mapping is a key operational mode of the scanning electron microscope (SEM) equipped with energy dispersive x-ray spectrometry (EDS). The popularity of x-ray mapping persists despite the significant time penalty due to the relatively

Mistakes Encountered During Automatic Peak Identification in Low Beam Energy X-Ray Microanalysis

April 1, 2007

Author(s)

Dale E. Newbury

Automated peak identification in electron beam excited x-ray microanalysis with energy dispersive x-ray spectrometry is subject to occasional mistakes even on well separated, high intensity peaks arising from major constituents. The problem is exacerbated

Preface for Special Issue of Surface and Interface Analysis with the Proceedings of the NIST Workshop on 'Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology'

November 1, 2005

Author(s)

Cedric J. Powell, Dale E. Newbury

An introduction is given for the Proceedings of the Workshop on Modeling Electron Transport for Applications in Electron and X-ray Analysis and Metrology that was held at NIST on November 8-10, 2004.

Simulation of Electron-Excited X-Ray Spectra With NIST-NIH Desktop Spectrum Analyzer (DTSA)

November 1, 2005

Author(s)

Dale E. Newbury, Robert L. Myklebust

Desktop Spectrum Analyzer (DTSA) is a comprehensive software platform for the collection, simulation, processing, qualitative and quantitative analysis of electron-excited x-ray spectra. Spectrum simulation is based upon solving the rigorous expression for

X-Ray Spectrometry and Spectrum Image Mapping at Output Count Rates Above 100 kHz with a Silicon Drift Detector on a Scanning Electron Microscope

September 1, 2005

Author(s)

Dale E. Newbury

A third generation silicon drift detector (SDD), a silicon multicathode detector (SMCD), was tested as an analytical x-ray spectrometer on a scanning electron microscope. The resolution, output count rate, and spectral quality were tested as a function of

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