Publications

Displaying 176 - 193 of 193

Thermal Expansion Coefficients of Low-K Dielectric Films From Fourier Analysis of X-Ray Reflectivity

July 1, 2000

Author(s)

Charles E. Bouldin, William E. Wallace, G W. Lynn, S C. Roth, Wen-Li Wu

We determine the thermal expansion coefficient of a fluorinated poly (arylene ether) low-k dielectric film using Fourier analysis of x-ray reflectivity data. The approach is similar to that used in Fourier analysis of x-ray absorption fine structure. The

A Three-Phase Model for the Structure of Porous Thin Films Determined by X-Ray Reflectivity and Small Angle Neutron Scattering

April 1, 2000

Author(s)

Wen-Li Wu, Eric K. Lin, C Jin, J T. Wetzel

A methodology to characterize nanoporous thin films based on a novel combination of high resolution specular x-ray reflectivity and small angle neutron scattering has been advanced to accommodate heterogeneities within the material surrounding nanoscale

Properties of Nanoporous Silica Thin Films Determined by High-Resolution X-Ray Reflectivity and Small-Angle Neutron Scattering

February 1, 2000

Author(s)

Wen-Li Wu, William E. Wallace, Eric K. Lin, G W. Lynn, Charles J. Glinka, E T. Ryan, H M. Ho

A new methodology based on a novel combination of a high-resolution specular x-ray reflectivity and small-angle neutron scattering has been developed to evaluate the structural properties of low-dielectric-constant porous silica thin films about one

Anomalies in the Optical Index of Refraction of Spun Cast Polystyrene Thin Films

January 1, 2000

Author(s)

X Z. Hu, K Shin, Miriam Rafailovich, J Sokolov, R Stein, Y Chan, K. L. Williams, Wen-Li Wu, R Kolb

Investigation of N2 Plasma Effects on the Depth Profile of Hydrogen Silsesquioxane Thin Films Using High Resolution Specular X-Ray Reflectivity

January 1, 2000

Author(s)

V. J. Lee, Eric K. Lin, J K. Lan, Y L. Cheng, H C. Liou, Wen-Li Wu, Y L. Wang, M S. Feng, C G. Chao

Neutron reflectivity Measurements of Molecular Mass Effects on Polymer Mobility near the Polymer/Solid Interface

January 1, 2000

Author(s)

Eric K. Lin, D J. Pochan, Wen-Li Wu, Sushil K. Satija

Small-Angle Neutron Scattering Measurements for the Characterization of Lithographically Prepared Structures

January 1, 2000

Author(s)

Wen-Li Wu, Eric K. Lin, Q Lin, M Angelopolous

Structural Evolution of Silsesquioxane-based Organic/Inorganic Nanocomposite Networks

January 1, 2000

Author(s)

Christopher L. Soles, Eric K. Lin, Wen-Li Wu, C X. Zhang, R M. Laine

Structure and Property Characterization of Low-k Dielectric Porous Thin Films Determined by X-ray Reflectivity and Small-Angle Neutron Scattering

January 1, 2000

Author(s)

Eric K. Lin, V. J. Lee, Barry J. Bauer, Haonan Wang, J T. Wetzel, Wen-Li Wu

Thermal Expansion Coefficients of Low-K Dielectric Films From Fourier Analysis of X-Ray Reflectivity

January 1, 2000

Author(s)

Charles E. Bouldin, William E. Wallace, G W. Lynn, S C. Roth, Wen-Li Wu

Shear Induced Polymer Melt Desorption From an Attractive Substrate

June 24, 1999

Author(s)

Eric K. Lin, R Kolb, Wen-Li Wu, Sushil K. Satija

Shear induced adsorption/desorption of a highly entangled polymer melt from an attractive interface was directly observed using neutron reflectometry. The concentration of poly(methyl methacrylate) (d-PMMA) in a hydrogenated PMMA matrix was measured within

Reduced Polymer Mobility Near the Polymer Solid Interface as Measured by Neutron Reflectivity

June 1, 1999

Author(s)

Eric K. Lin, R Kolb, Sushil K. Satija, Wen-Li Wu

Neutron reflectometry is used to measure the rate of interdiffusion over distances less than 200 between bilayer samples of deuterated and hydrogenated poly(methyl methacrylate) (PMMA) films with the polymer-polymer interface located near the native oxide

Polymer Mobility Near the Polymer/Solid Interface

May 6, 1999

Author(s)

Eric K. Lin, Wen-Li Wu, Sushil K. Satija, R Kolb

Neutron reflectometry is used to measure polymer mobility near an attractive solid surface over distances less than the bulk polymer radius of gyration, R g. Effective diffusion coefficients, D eff, are determined from the rates of interdiffusion between

Enhanced Polymer Segment Exchange Kinetics Due to an Applied Shear Field

January 1, 1999

Author(s)

Eric K. Lin, R Kolb, Sushil K. Satija, Wen-Li Wu

Network Structure of Bimodal Epoxies - a Small Angle X-Ray Scattering Study

January 1, 1999

Author(s)

N C. BeckTan, Barry J. Bauer, J Plestil, J D. Barnes, Da-Wei Liu, L Matejka, K Dusek, Wen-Li Wu

Studies of the Polymer Thin Film Glass Transition Temperature Monitored With the Complex Viscoelastic Coefficients

December 1, 1998

Author(s)

Christopher C. White, Wen-Li Wu

In integrated circuit manufacturing, the gaps between metal lines are a critical parameter, and polymer films are being evaluated as materials to fill these thin gaps. Desire to maximize the number of elements within a given area have forced the gaps to

Characterization of Planarity of Polymer Thin Films on Rough Surfaces

July 1, 1998

Author(s)

Wen-Li Wu, William E. Wallace

Angle-dependent total reflection x-ray fluorescence (TRXF) is used to characterize the surface roughness or the extent of planarization of a thin polymer coating on a stainless steel surface with significant roughness. The objective of this work is to

A Novel Method to Determine the Mechanical Properties of Ultra-Thin Films

April 1, 1998

Author(s)

Christopher C. White, Wen-Li Wu

Recent experimental results based on x-ray reflectivity, ellipsometry and positron annihilation spectroscopy, etc. have demonstrated that physical properties of polymer films thinner than one micron may deviate significantly from the expected bulk values

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