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Search Publications by: Eric K. Lin (Fed)

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Displaying 176 - 199 of 199

Design of Nanoporous Ultra Low-Dielectric Constant Organosilicates by Self-Assembly

April 1, 2001
Author(s)
S Y. Yang, T L. Dull, J Sun, Albert F. Yee, P Mirau, C S. Pai, O Nalamasu, E Reichmanis, Eric K. Lin, V. J. Lee, D Gidley, W E. Frieze
Here we report a new class of materials that can reach ultra low- dielectric constants while maintaining good mechanical properties. In this approach, amphiphilic triblock copolymers, poly(ethylene oxide-b-propylene oxide-b-ethylene oxide) (PEO-b-PPO-b-PEO

Structure and Property Characterization of Low-k Dielectric Porous Thin Films

April 1, 2001
Author(s)
Barry J. Bauer, Eric K. Lin, V. J. Lee, Haonan Wang, Wen-Li Wu
High-resolution X-ray reflectivity and small angle neutron scattering measurements are used as complementary techniques to characterize the structure and properties of porous thin films for use as low-k interlevel dielectric (ILD) materials. With the

Abstracts for the MSEL Assessment Panel, March 2001

January 26, 2001
Author(s)
Leslie E. Smith, Alamgir Karim, Leonid A. Bendersky, C Lu, J J. Scott, Ichiro Takeuchi, Kathleen M. Flynn, Vinod K. Tewary, Davor Balzar, G A. Alers, Stephen E. Russek, Charles C. Han, Haonan Wang, William E. Wallace, Daniel A. Fischer, K Efimenko, Wen-Li Wu, Jan Genzer, Joseph C. Woicik, Thomas H. Gnaeupel-Herold, Henry J. Prask, Charles F. Majkrzak, Norman F. Berk, John G. Barker, Charles J. Glinka, Eric K. Lin, Ward L. Johnson, Paul R. Heyliger, David T. Read, R R. Keller, J Blendell, Grady S. White, Lin-Sien H. Lum, Eric J. Cockayne, Igor Levin, C E. Johnson, Maureen E. Williams, Gery R. Stafford, William J. Boettinger, Kil-Won Moon, Daniel Josell, Daniel Wheeler, Thomas P. Moffat, W H. Huber, Lee J. Richter, Clayton S. Yang, Robert D. Shull, R A. Fry, Robert D. McMichael, William F. Egelhoff Jr., Ursula R. Kattner, James A. Warren, Jonathan E. Guyer, Steven P. Mates, Stephen D. Ridder, Frank S. Biancaniello, D Basak, Jon C. Geist, Kalman D. Migler
Abstracts relating to research and development in the NIST Materials Science and Engineering Laboratory (MSEL) are presented for a poster session to be presented to the 2001 MSEL Assessment Panel.

Design of a Nanoporous Ultra Low-Dielectric Constant Organosilicate

January 1, 2001
Author(s)
S Y. Yang, C S. Pai, O Nalamasu, E Reichmanis, P Mirau, Yaw S. Obeng, J Seputro, Eric K. Lin, V. J. Lee
A new class of organosilicate has been developed that can attain an ultra low-dielectric constant, k of less than 2.0, with high dielectric breakdown strength (> 2 MV/cm). In this approach, a series of triblock polymers, poly(ethylene oxide-b-propylene

Small-Angle Neutron Scattering Measurements of Nanoscale Lithographic Features

December 1, 2000
Author(s)
Wen-Li Wu, Eric K. Lin, Q Lin, M Angelopoulos
The continuing decrease in feature sizes in the semiconductor and other nanofabriation industries has placed increasingly stringent demands on current microscopy-based techniques to precisely measure both the critical dimensions and the quality (i.e. line

Shear Induced Polymer Melt Desorption From an Attractive Substrate

June 24, 1999
Author(s)
Eric K. Lin, R Kolb, Wen-Li Wu, Sushil K. Satija
Shear induced adsorption/desorption of a highly entangled polymer melt from an attractive interface was directly observed using neutron reflectometry. The concentration of poly(methyl methacrylate) (d-PMMA) in a hydrogenated PMMA matrix was measured within

Polymer Mobility Near the Polymer/Solid Interface

May 6, 1999
Author(s)
Eric K. Lin, Wen-Li Wu, Sushil K. Satija, R Kolb
Neutron reflectometry is used to measure polymer mobility near an attractive solid surface over distances less than the bulk polymer radius of gyration, R g. Effective diffusion coefficients, D eff, are determined from the rates of interdiffusion between