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We have developed a micromachined bimaterial cantilever with a thin-film ferromagnetic resonance (FMR) sensor to probe rf fields near microwave devices. A patterned permalloy film deposited at the tip of the cantilever serves as the localized FMR probe
We have developed a ferromagnetic resonance (FMR) instrument based on a torsion-mode atomic-force microscope (AFM). The instrument measures the torque on a magnetized thin film in a static out-of-plane field perpendicular to the film surface. The magnetic