December 1, 2010
Author(s)
James C. Booth, Nathan D. Orloff, Jordi Mateu, Michael D. Janezic, Matthew Rinehart, James A. Beall
We describe the design, fabrication, and evaluation of a new on-wafer measurement platform for the rapid, quantitative determination of the complex permittivity of nL fluid volumes over the frequency range from 10 MHz - 40 GHz. Our measurement platform