June 3, 2007
Author(s)
Nathan D. Orloff, Jordi Mateu, Makoto Murakami, Ichiro Takeuchi, James C. Booth
We develop a measurement technique for obtaining the broadband complex permittivity of thin-film dielectric materials over the frequency range from 100 Hz-40 GHz. Such broad frequency coverage can only be accomplishe3d by combining lumped-element and