Cresswell, M.
, Allen, R.
, Linholm, C.
, Hood, C.
, Penzes, W.
and Teague, E.
(1993),
Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System, Proc., IEEE Conference on Microelectronic Test Structures, Sitges, 1, SP
(Accessed July 17, 2024)
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Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System
Published
Author(s)
, , C. H. Linholm, , ,
Proceedings Title
Proc., IEEE Conference on Microelectronic Test Structures
Conference Dates
March 22-25, 1993
Conference Location
Sitges, 1, SP
Pub Type
Conferences
Citation
Issues
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Created December 30, 1993, Updated October 12, 2021