Edamura, M.
and Benck, E.
(2003),
Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas, Journal of Vacuum Science and Technology A
(Accessed December 26, 2024)
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Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas
Published
Author(s)
M Edamura,
Citation
Journal of Vacuum Science and Technology A
Pub Type
Journals
Citation
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Created December 31, 2002, Updated October 12, 2021