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Using Carbon Nanotube Cantilevers in Scanning Probe Metrology

Published

Author(s)

R Schlaf, Y Emirov, J A. Bieber, A Sikder, J Kohlscheen, D A. Walters, M R. Islam, B Metha, Z F. Ren, T L. Shofner, B B. Rossi, Michael W. Cresswell
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)
Conference Dates
March 3-8, 2002
Conference Location
Santa Clara, CA, USA
Conference Title
SPIE - The International Society for Optical Engineering

Citation

Schlaf, R. , Emirov, Y. , Bieber, J. , Sikder, A. , Kohlscheen, J. , Walters, D. , Islam, M. , Metha, B. , Ren, Z. , Shofner, T. , Rossi, B. and Cresswell, M. (2002), Using Carbon Nanotube Cantilevers in Scanning Probe Metrology, Proc. Intl. Soc. for Optical Engineering (SPIE), Santa Clara, CA, USA (Accessed December 26, 2024)

Issues

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Created May 31, 2002, Updated October 12, 2021