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Information Technology

Data & informatics

News and Updates

Events

Projects and Programs

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METIS

Ongoing
A Metrology Exchange to Innovate in Semiconductors

Publications

Detection limits of AI-based SEM dimensional metrology

Author(s)
Peter Bajcsy, Brycie Wiseman, Michael Paul Majurski, Andras Vladar
The speed of in-line scanning electron microscope (SEM) measurements of linewidth, contact hole, and overlay is critically important for identifying the

NIST conference papers fiscal year 2024

Author(s)
Kathryn Miller, Myriam Dilawari, Julie Jew
This Special Publication represents the work of researchers at professional conferences, as reported by NIST employees in Fiscal Year 2024 (October 1, 2023

Software

The NIST Data Alignment Tool

The Data Alignment Tool (DAT) was built to assist with the analysis of data used in testing fault detection and diagnostics (FDD) tools and building

RECIPE

RECIPE is a FORTRAN program for determining one-sided tolerance limits (in particular, A- and B-basis material property values) for regression models in the

Tools and Instruments

Awards