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Synchrotron Ultraviolet Radiation Facility SURF III

Synchrotron Ultraviolet Radiation Facility SURF III
Credit: NIST

The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Optical Radiation Group as a stable light source for radiometry and research. SURF covers the wavelength range from the far infrared to the soft x-ray.

  • Provides our National standards for UV and EUV radiometry
    • Monitoring space weather and solar variability
    • Advancing industrial uses – e.g. EUV lithography, UV curing
  • Provides continuum radiation from the soft x-ray to the infrared spectral regions, with ideal output for EUV studies related to solar physics and the development of EUV lithography
  • Calculable irradiance traceable to the SI units to less than 1 % absolute uncertainty from 4 nm to 400 nm
  • Beamlines equipped for detector, spectrometer, and lamp calibrations; reflectometry and transmission measurements; degradation and lifetime studies
  • Carefully characterized and maintained source, operated in a clean hydrocarbon-free vacuum
General SURF Program InquiriesEdward Hagley
SURF Accelerator SystemsEdward Hagley
Synchrotron Radiation ApplicationsUwe Arp
Extreme-ultraviolet ProgramSteven Grantham
 
Beamline 1Extreme-ultraviolet multilayer degradation studies
Properties of extreme-ultraviolet photoresists
Steven Grantham, Stephanie Moffitt
Beamline 2Absolute source-based irradiance calibrations of radiometric instrumentation
Ultraviolet lamp calibrations
Rob Vest, Uwe Arp
Beamline 3Ultraviolet and extreme-ultraviolet optical properties and calibrationsRob Vest, Uwe ArpStephanie Moffitt
Beamline 4Extreme-ultraviolet and ultraviolet calibrationsUwe Arp, Rob Vest
Beamline 5New Beam Imaging SystemUwe Arp
Beamline 6Current monitorEdward Hagley, Alex Farrell
Beamline 6BEducational DisplayCharles Clark
Beamline 7Extreme-ultraviolet optical properties and calibrationsSteven Grantham
Beamline 8Extreme-ultraviolet multilayer endurance testingStephanie Moffitt
Created May 15, 2009, Updated April 2, 2025