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Interlaboratory study on linewidth measurements for antireflective chromium photomasks:

Published

Author(s)

John M Jerke, M Carroll Croarkin, Ruth N Varner
Citation
- NBS SP 400-74
Report Number
NBS SP 400-74

Citation

Jerke, J. , Croarkin, M. and Varner, R. (1982), Interlaboratory study on linewidth measurements for antireflective chromium photomasks:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-74 (Accessed October 6, 2024)

Issues

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Created January 1, 1982, Updated May 19, 2023