Ehrstein, J.
, Croarkin, M.
and Liu, H.
(2006),
Standard Reference material ::the certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe maesurements, 2006 edition, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-131e2006
(Accessed January 2, 2025)
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Standard Reference material ::the certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe maesurements, 2006 edition
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- NIST SP 260-131e2006
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NIST SP 260-131e2006
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NIST Pubs
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Created January 1, 2006, Updated May 20, 2023