Dagata, J.
, Yokoyama, H.
and Perez-Murano, F.
(2003),
Workshop summary report ::scanning probe nanolithography workshop, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.7040
(Accessed July 27, 2024)
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Workshop summary report ::scanning probe nanolithography workshop
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- NIST IR 7040
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NIST IR 7040
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NIST Pubs
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Created January 1, 2003, Updated May 20, 2023