Kreider, K.
, DeWitt, D.
, Tsai, B.
and Lojek, B.
(2001),
Workshop on temperature measurement of semiconductor wafers using thermocouples:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6566
(Accessed July 27, 2024)
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Workshop on temperature measurement of semiconductor wafers using thermocouples:
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- NIST IR 6566
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NIST IR 6566
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NIST Pubs
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Created January 1, 2001, Updated May 20, 2023