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Air Quality and the Semiconductor Industry
Understanding Air Quality
Air quality is a measure of the atmospheric concentration of pollutants in a specific area. Air pollutants can be any substances in the air that can cause harm to humans or the environment. These pollutants can originate from natural sources or can be human-made.
Air quality is critical to health and well-being. Poor air quality can exacerbate respiratory conditions, reduce lung function, and even increase the risk of chronic diseases such as asthma, heart disease, and stroke. To learn about air quality in your neighborhood, the EPA, along with partners, provides an interactive map that allows you to check the status of outdoor air quality every day.
For more information see: AirNow.gov
Emissions from Semiconductor Facilities and Control Measures
Semiconductor fabrication facilities are sources of various air pollutants. These emissions are strictly regulated under federal and state laws to protect human health and the environment. Facilities must adhere to stringent regulatory standards to control and minimize their emissions.
To meet air permitting requirements, the semiconductor manufacturing industry employs several air pollution control measures, including:
- Add-on Control Devices: These devices are used to reduce or remove pollutants from air discharge streams
- Preventative Measures: Strategies are implemented to prevent the release of pollutants into the atmosphere (i.e., scrubbers)
The Clean Air Act and Air Permitting
The primary federal law designed to improve air quality and protect health and the environment is the Clean Air Act. The CAA mandates that the Environmental Protection Agency (EPA) and states address multiple air pollution problems through programs based upon the latest scientific knowledge.
The CAA established several permitting programs to achieve its goals. The EPA can delegate its permitting authority to states and tribes, allowing for air permits to be issued by state, tribal, or local air pollution control agencies. Some permits are also issued by EPA regional offices. Semiconductor fabrication facilities are generally subject to both construction and operation permitting requirements under the CAA.
The specific permitting requirements for semiconductor fabs vary depending on several factors:
- Location: The air quality designations applicable to the facility’s location.
- Emissions: The nature and quantity of the facility’s emissions
Facilities may be classified as “minor” or “major” sources:
- Minor Sources: Emit pollutants below applicable thresholds and are subject to less stringent permitting requirements.
- Major Sources: Emit pollutants above certain thresholds and are subject to more substantial permitting requirements and controls.
Ensuring Compliance
The Environmental Division works with applicants to ensure compliance with air quality regulations and to implement effective air pollution control measures. Through Best Management Practices (BMPs) and proactive engagement, the Environmental Division aims to minimize the industry’s environmental impact while it continues to innovate and produce essential technologies.
For more information on air quality regulations and the semiconductor industry visit the EPA’s Clean Air Act page.
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