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Index of Semiconductor Process Gases - Hydrogen Bromide
|
HYDROGEN |
M.W. [1] 80.9119 |
N.B.P [2] 206.45 K |
T.P [3] 185.15 K |
|
HBr |
Pc [4] 8.552 MPa |
Tc [4] 363.15 K |
Vc [3] 0.1 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure MPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
*1%/+0.1% |
1% |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
#10% |
#10% |
|||
|
Reference |
||||||||
|
210 |
*3.502 |
0.12 |
-398.9 |
958.5 |
-66306 |
658360 |
#3.9 |
#14.86 |
|
215 |
*3.502 |
0.15 |
-377.1 |
895.0 |
-52341 |
533020 |
#4.1 |
#15.13 |
|
220 |
*3.502 |
0.19 |
-357.2 |
838.1 |
-41267 |
433812 |
#4.2 |
#15.40 |
|
225 |
*3.502 |
0.24 |
-338.9 |
786.8 |
-32437 |
354720 |
#4.3 |
#15.67 |
|
230 |
*3.502 |
0.30 |
-322.1 |
740.5 |
-25360 |
291244 |
#4.4 |
#15.95 |
|
235 |
*3.502 |
0.36 |
-306.7 |
698.6 |
-19666 |
239985 |
#4.6 |
#16.22 |
|
240 |
+3.503 |
0.44 |
-292.4 |
660.4 |
-15065 |
198353 |
#4.7 |
#16.49 |
|
245 |
+3.503 |
0.53 |
-279.1 |
625.6 |
-11336 |
64360 |
#4.8 |
#16.77 |
|
250 |
+3.503 |
0.63 |
-266.8 |
593.8 |
-8305 |
136466 |
#5.0 |
#17.04 |
|
255 |
+3.503 |
0.74 |
-255.3 |
564.6 |
-5837 |
113473 |
#5.1 |
#17.31 |
|
260 |
+3.503 |
0.87 |
-244.6 |
537.8 |
-3823 |
94438 |
#5.2 |
#17.59 |
|
265 |
+3.503 |
1.02 |
-234.6 |
513.0 |
-2179 |
78620 |
#5.4 |
#17.86 |
|
270 |
+3.503 |
1.18 |
-225.2 |
490.1 |
-836 |
65426 |
#5.5 |
#18.14 |
|
275 |
+3.503 |
1.36 |
-216.4 |
468.9 |
260 |
54385 |
#5.6 |
#18.41 |
|
280 |
+3.503 |
1.56 |
-208.2 |
449.3 |
1154 |
45118 |
#5.7 |
#18.68 |
|
285 |
+3.503 |
1.78 |
-200.4 |
431.0 |
1882 |
37318 |
#5.9 |
#18.96 |
|
290 |
+3.503 |
2.02 |
-193.0 |
414.0 |
2472 |
30736 |
#6.0 |
#19.23 |
|
295 |
+3.503 |
2.28 |
-186.1 |
398.0 |
2949 |
25171 |
#6.1 |
#19.51 |
|
300 |
+3.503 |
2.57 |
-179.5 |
383.2 |
3332 |
20455 |
#6.3 |
#19.78 |
|
305 |
+3.504 |
2.88 |
-173.3 |
369.2 |
3636 |
16453 |
#6.4 |
#20.06 |
|
310 |
+3.504 |
3.21 |
-167.4 |
356.2 |
3875 |
13051 |
#6.5 |
#20.33 |
|
315 |
+3.504 |
3.57 |
-161.8 |
343.9 |
4060 |
10156 |
#6.7 |
#20.60 |
|
320 |
+3.504 |
3.96 |
-156.5 |
332.3 |
4200 |
7691 |
#6.8 |
#20.88 |
|
340 |
+3.505 |
5.78 |
-137.6 |
292.3 |
4443 |
972 |
#7.3 |
#21.97 |
|
360 |
+3.507 |
8.06 |
-121.8 |
260.1 |
4388 |
-2551 |
#7.9 |
#23.07 |
|
380 |
+3.509 |
- |
-108.5 |
233.7 |
4197 |
-4334 |
#8.4 |
#24.16 |
|
400 |
+3.512 |
- |
-97.1 |
211.8 |
3951 |
-5150 |
#8.9 |
#25.24 |
|
420 |
+3.516 |
- |
-87.2 |
193.4 |
3691 |
-5426 |
#9.5 |
#26.33 |
|
440 |
+3.520 |
- |
-78.6 |
177.7 |
3438 |
-5401 |
#10.0 |
#27.40 |
|
450 |
*3.524 |
- |
-74.7 |
170.7 |
3318 |
-5321 |
#10.3 |
#27.94 |
|
460 |
*3.527 |
- |
-71.0 |
164.1 |
3202 |
-5211 |
#10.6 |
#28.48 |
|
480 |
*3.533 |
- |
-64.3 |
152.4 |
2986 |
-4938 |
#11.1 |
#29.55 |
|
500 |
*3.540 |
- |
-58.2 |
142.1 |
2790 |
-4627 |
#11.6 |
#30.61 |
|
550 |
*3.561 |
- |
-45.7 |
121.3 |
2387 |
-3835 |
#13.0 |
#33.25 |
|
600 |
*3.587 |
- |
-35.9 |
105.5 |
2084 |
-3135 |
#14.4 |
#35.85 |
|
650 |
*3.617 |
- |
-27.9 |
93.1 |
1857 |
-2560 |
#15.8 |
#38.40 |
|
700 |
*3.650 |
- |
-21.4 |
83.2 |
1685 |
-2096 |
#17.1 |
#40.90 |
|
750 |
*3.687 |
- |
-16.0 |
75.1 |
1553 |
-1726 |
#18.5 |
#43.36 |
|
800 |
*3.725 |
- |
-11.3 |
68.4 |
1452 |
-1429 |
#19.9 |
#45.75 |
|
850 |
*3.764 |
- |
-7.36 |
62.7 |
1372 |
-1190 |
#21.3 |
#48.09 |
|
900 |
*3.803 |
- |
-3.92 |
57.8 |
1310 |
-996 |
#22.6 |
#50.36 |
|
950 |
*3.842 |
- |
-0.91 |
53.6 |
1261 |
-837 |
#24.0 |
#52.57 |
|
1000 |
*3.881 |
- |
1.74 |
49.9 |
1221 |
-708 |
#25.4 |
#54.71 |
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1980).
- Horvath, A.L., "Physical Properties of Inorganic Compounds", Crane Russak, New York (1975).
- Mathews, J.F., "The Critical Constants of Inorganic Substances", Chem. Rev. (1972, 72, 71).
- Westrum, Jr., E.F., Stull, D.R., and Sinke, G.C., "The Chemical Thermodynamics of Organic Compounds", John Wiley and Sons, New York (1969).
- Hurly, J.J., "Thermophysical Properties of Gaseous HBr and BCl3 from Speed-of-Sound Measurements, Int. J. Thermophys, (2000, 21, 4).
- Stull, D.R., "Vapor Pressure of Pure Substances", Ind. Eng. Chem. (1947, 39, 517).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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