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Index of Semiconductor Process Gases - Carbon Monoxide
|
CARBON |
M.W. [1] 28.0104 |
N.B.P [2] 81.7 K |
T.P [2] 68.15 K |
|
CO |
Pc [3] 3.499 MPa |
Tc [3] 132.92 K |
Vc [4] 0.092166 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
1% |
1% |
5% |
- |
10% |
- |
5% |
5% |
|
Reference |
||||||||
|
75 |
3.50 |
44.07 |
-345.5 |
579.4 |
25834 |
-30427 |
6.3 |
4.9 |
|
80 |
3.50 |
83.65 |
-300.8 |
501.8 |
23762 |
-33180 |
6.8 |
5.3 |
|
85 |
3.50 |
146.17 |
-264.7 |
439.6 |
21740 |
-33208 |
7.3 |
5.6 |
|
90 |
3.50 |
238.79 |
-235.0 |
389.3 |
19874 |
-31936 |
7.7 |
6.0 |
|
95 |
3.50 |
369.17 |
-210.3 |
348.2 |
18195 |
-30089 |
8.2 |
6.3 |
|
100 |
3.50 |
545.28 |
-189.4 |
314.2 |
16703 |
-28043 |
8.7 |
6.7 |
|
110 |
3.50 |
1068.16 |
-156.2 |
261.8 |
14222 |
-24023 |
9.7 |
7.4 |
|
120 |
3.50 |
1879.21 |
-131.1 |
223.6 |
12287 |
-20501 |
10.6 |
8.0 |
|
130 |
3.50 |
3063.14 |
-111.5 |
194.8 |
10766 |
-17564 |
11.5 |
8.7 |
|
140 |
3.50 |
- |
-95.8 |
172.5 |
9555 |
-15149 |
12.4 |
9.3 |
|
150 |
3.50 |
- |
-82.9 |
154.6 |
8580 |
-13167 |
13.3 |
9.9 |
|
160 |
3.50 |
- |
-72.2 |
140.1 |
7784 |
-11534 |
14.2 |
10.5 |
|
170 |
3.50 |
- |
-63.1 |
128.2 |
7127 |
-10180 |
15.0 |
11.1 |
|
180 |
3.50 |
- |
-55.3 |
118.1 |
6578 |
-9049 |
15.9 |
11.7 |
|
190 |
3.50 |
- |
-48.6 |
109.5 |
6115 |
-8097 |
16.7 |
12.2 |
|
200 |
3.50 |
- |
-42.7 |
102.1 |
5721 |
-7291 |
17.5 |
12.8 |
|
210 |
3.50 |
- |
-37.4 |
95.7 |
5382 |
-6602 |
18.3 |
13.3 |
|
220 |
3.50 |
- |
-32.8 |
90.0 |
5089 |
-6010 |
19.1 |
13.8 |
|
230 |
3.50 |
- |
-28.6 |
85.0 |
4833 |
-5499 |
19.9 |
14.4 |
|
240 |
3.50 |
- |
-24.9 |
80.6 |
4609 |
-5054 |
20.7 |
14.9 |
|
250 |
3.50 |
- |
-21.5 |
76.6 |
4411 |
-4665 |
21.4 |
15.4 |
|
260 |
3.50 |
- |
-18.4 |
73.0 |
4234 |
-4323 |
22.2 |
15.9 |
|
270 |
3.50 |
- |
-15.5 |
69.7 |
4077 |
-4021 |
22.9 |
16.4 |
|
280 |
3.50 |
- |
-12.9 |
66.7 |
3936 |
-3753 |
23.7 |
16.8 |
|
290 |
3.50 |
- |
-10.5 |
64.0 |
3808 |
-3514 |
24.4 |
17.3 |
|
300 |
3.50 |
- |
-8.3 |
61.5 |
3693 |
-3301 |
25.1 |
17.8 |
|
310 |
3.51 |
- |
-6.3 |
59.2 |
3588 |
-3109 |
25.8 |
18.2 |
|
320 |
3.51 |
- |
-4.3 |
57.1 |
3492 |
-2936 |
26.5 |
18.7 |
|
330 |
3.51 |
- |
-2.5 |
55.1 |
3404 |
-2781 |
27.2 |
19.1 |
|
340 |
3.51 |
- |
-0.9 |
53.3 |
3323 |
-2639 |
27.9 |
19.5 |
|
350 |
3.51 |
- |
0.7 |
51.5 |
3249 |
-2511 |
28.6 |
20.0 |
|
360 |
3.52 |
- |
2.2 |
49.9 |
3179 |
-2394 |
29.3 |
20.4 |
|
370 |
3.52 |
- |
3.6 |
48.4 |
3115 |
-2287 |
29.9 |
20.8 |
|
380 |
3.52 |
- |
4.9 |
47.0 |
3056 |
-2189 |
30.6 |
21.2 |
|
390 |
3.52 |
- |
6.1 |
45.7 |
3000 |
-2099 |
31.3 |
21.6 |
|
400 |
3.53 |
- |
7.3 |
44.4 |
2948 |
-2016 |
31.9 |
22.0 |
|
410 |
3.53 |
- |
8.4 |
43.2 |
2899 |
-1939 |
32.6 |
22.4 |
|
420 |
3.54 |
- |
9.4 |
42.1 |
2853 |
-1869 |
33.2 |
22.8 |
|
430 |
3.54 |
- |
10.4 |
41.1 |
2810 |
-1803 |
33.8 |
23.2 |
|
440 |
3.55 |
- |
11.4 |
40.0 |
2769 |
-1743 |
34.5 |
23.6 |
|
450 |
3.55 |
- |
12.3 |
39.1 |
2731 |
-1686 |
35.1 |
24.0 |
|
460 |
3.56 |
- |
13.2 |
38.2 |
2694 |
-1634 |
35.7 |
24.3 |
|
470 |
3.56 |
- |
14.0 |
37.3 |
2660 |
-1585 |
36.3 |
24.7 |
|
480 |
3.57 |
- |
14.8 |
36.5 |
2627 |
-1539 |
37.0 |
25.1 |
|
490 |
3.58 |
- |
15.5 |
35.7 |
2596 |
-1497 |
37.6 |
25.4 |
|
500 |
3.58 |
- |
16.3 |
34.9 |
2566 |
-1457 |
38.2 |
25.8 |
|
550 |
3.62 |
- |
19.5 |
31.6 |
2435 |
-1290 |
41.2 |
27.6 |
|
600 |
3.66 |
- |
22.1 |
28.8 |
2328 |
-1165 |
44.0 |
29.2 |
|
650 |
3.70 |
- |
24.4 |
26.5 |
2239 |
-1069 |
46.9 |
30.8 |
|
700 |
3.74 |
- |
25.2 |
20.8 |
2163 |
-994 |
49.6 |
32.4 |
|
750 |
3.78 |
- |
26.6 |
18.8 |
2096 |
-934 |
52.3 |
33.8 |
|
800 |
3.81 |
- |
27.8 |
17.0 |
2038 |
-885 |
54.9 |
35.3 |
|
850 |
3.84 |
- |
28.7 |
15.5 |
1985 |
-844 |
57.4 |
36.7 |
|
900 |
3.87 |
- |
29.6 |
14.1 |
1938 |
-809 |
60.0 |
38.0 |
|
950 |
3.90 |
- |
30.3 |
12.9 |
1895 |
-780 |
62.4 |
39.3 |
|
1000 |
3.91 |
- |
31.0 |
11.9 |
1856 |
-755 |
64.8 |
40.6 |
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Selected Values of Properties of Chemical Compounds", Data Project; Thermodynamics Research Center, Texas A&M University, College Station, Texas (1980-extant. loose-leaf data sheets).
- Zwolinski, B.J., Kudchadker, A.P., and Alani, G.H., "The Critical Constants of Organic Substances", Chem. Rev. (1968, 68, 659).
- "TRC Thermodynamic Tables-Hydrocarbons", Thermodynamics Research Center, The Texas A&M University System, College Station, TX (1985).
- Goodwin, R.D., "Carbon Monoxide Thermophysical Properties from 68 to 1000K at Pressures to 100 MPa", J. Phys. Chem. Ref. Data (1985, 14, 849).
- Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517).
- Saville, G., DaPointe, M.N., Calado, J.C.G., Barreiros, S.F., "Second Virial Coefficients of Carbon Monoxide", J. Chem. Thermo. (1987, 19, 947).
- Calculated from a Lennard-Jones model fit to Ref [2,7] second virial coefficients.
- Stephan, K., Lucas, K., "Viscosity of Dense Fluids", New York: Plenum Press (1979).
- "Thermal Conductivity 17", Thermophysical Properties Division, Nat. Bur. Stand., Boulder, CO (1983, 294).
- "Thermophysical Properties of Matter", IFI/Plenum, New York, (1970).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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