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Index of Semiconductor Process Gases - Ethylene Oxide
|
ETHYLENE OXIDE |
M.W. [1] |
N.B.P [2] 283.6 K |
T.P [2] 160.65 K |
|
C2H4O |
Pc [3] 7.19 MPa |
Tc [3] 469.15 K |
Vc [3] 0.14030 m3/kmol |
Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Estimated |
*1%/+0.1% |
5% |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
5% |
#10% |
|||
|
Reference |
||||||||
|
200.00 |
*4.36 |
0.71 |
-2534.77 |
10.118 |
-23168070 |
312.381 |
- |
#9.99 |
|
210.00 |
*4.46 |
1.64 |
-2094.54 |
8.022 |
-12053688 |
160.531 |
- |
#10.35 |
|
220.00 |
*4.57 |
3.47 |
-1758.66 |
6.482 |
-6497856 |
86.202 |
- |
#10.71 |
|
230.00 |
*4.69 |
6.83 |
-1497.23 |
5.325 |
-3598875 |
48.013 |
- |
#11.06 |
|
240.00 |
*4.83 |
12.58 |
-1290.13 |
4.439 |
-2031201 |
27.561 |
- |
#11.41 |
|
250.00 |
*4.97 |
21.90 |
-1123.50 |
3.748 |
-1158171 |
16.211 |
- |
#11.75 |
|
260.00 |
*5.12 |
36.29 |
-987.56 |
3.201 |
-660372 |
9.717 |
- |
#12.09 |
|
270.00 |
*5.28 |
57.62 |
-875.27 |
2.762 |
-371344 |
5.905 |
- |
#12.43 |
|
280.00 |
*5.45 |
88.08 |
-781.47 |
2.406 |
-201416 |
3.617 |
10.59 |
#12.76 |
|
290.00 |
+5.60 |
130.21 |
-702.33 |
2.113 |
-100860 |
2.219 |
11.43 |
#13.09 |
|
300.00 |
+5.76 |
186.90 |
-634.93 |
1.869 |
-41395 |
1.352 |
12.30 |
#13.41 |
|
310.00 |
+5.93 |
261.32 |
-577.06 |
1.665 |
-6582 |
0.810 |
13.21 |
#13.74 |
|
320.00 |
+6.10 |
356.91 |
-526.99 |
1.493 |
13314 |
0.468 |
14.15 |
#14.06 |
|
330.00 |
+6.27 |
477.37 |
-483.36 |
1.346 |
24148 |
0.252 |
15.13 |
#14.38 |
|
340.00 |
+6.45 |
626.63 |
-445.11 |
1.219 |
29489 |
0.116 |
16.15 |
#14.69 |
|
350.00 |
+6.62 |
808.81 |
-411.37 |
1.110 |
31533 |
0.032 |
17.20 |
#15.00 |
|
360.00 |
+6.80 |
1028.24 |
-381.45 |
1.016 |
31640 |
-0.020 |
18.29 |
#15.32 |
|
370.00 |
+6.97 |
1289.43 |
-354.78 |
0.933 |
30654 |
-0.050 |
19.42 |
#15.62 |
|
380.00 |
+7.15 |
1597.07 |
-330.90 |
0.860 |
29099 |
-0.065 |
20.59 |
#15.93 |
|
390.00 |
+7.32 |
1956.04 |
-309.42 |
0.795 |
27296 |
-0.072 |
21.79 |
#16.24 |
|
400.00 |
+7.49 |
2371.45 |
-290.02 |
0.738 |
25442 |
-0.073 |
23.03 |
#16.54 |
|
410.00 |
+7.66 |
2848.61 |
-272.44 |
0.687 |
23650 |
-0.071 |
24.31 |
#16.84 |
|
420.00 |
+7.83 |
3393.09 |
-256.44 |
0.641 |
21985 |
-0.067 |
25.63 |
#17.15 |
|
430.00 |
+7.99 |
4010.75 |
-241.84 |
0.600 |
20478 |
-0.061 |
26.99 |
#17.45 |
|
440.00 |
+8.14 |
4707.76 |
-228.47 |
0.563 |
19142 |
-0.055 |
28.39 |
#17.75 |
|
450.00 |
*8.34 |
5490.66 |
-216.19 |
0.530 |
17977 |
-0.049 |
29.83 |
#18.04 |
|
460.00 |
*8.49 |
6366.38 |
-204.89 |
0.499 |
16975 |
-0.042 |
31.31 |
#18.34 |
|
470.00 |
*8.64 |
7342.31 |
-194.46 |
0.472 |
16127 |
-0.036 |
32.83 |
#18.64 |
|
480.00 |
*8.79 |
- |
-184.80 |
0.446 |
15419 |
-0.031 |
34.40 |
#18.93 |
|
490.00 |
*8.93 |
- |
-175.84 |
0.423 |
14838 |
-0.026 |
36.00 |
#19.23 |
|
500.00 |
*9.07 |
- |
-167.51 |
0.402 |
14371 |
-0.021 |
37.64 |
#19.52 |
|
550.00 |
*9.74 |
- |
-133.43 |
0.318 |
13340 |
-0.002 |
46.50 |
#20.98 |
|
600.00 |
*10.36 |
- |
-108.45 |
0.259 |
13677 |
0.009 |
56.45 |
#22.42 |
|
650.00 |
*10.93 |
- |
-89.48 |
0.217 |
14678 |
0.015 |
67.54 |
#23.86 |
|
700.00 |
*11.45 |
- |
-74.65 |
0.185 |
15967 |
0.019 |
79.80 |
#25.28 |
|
750.00 |
*11.93 |
- |
-62.77 |
0.160 |
17347 |
0.021 |
93.28 |
#26.71 |
|
800.00 |
*12.38 |
- |
-53.06 |
0.141 |
18719 |
0.022 |
108.02 |
#28.11 |
|
850.00 |
*12.79 |
- |
-45.00 |
0.125 |
20034 |
0.022 |
124.08 |
#29.51 |
|
900.00 |
*13.17 |
- |
-38.21 |
0.113 |
21270 |
0.021 |
141.50 |
#30.90 |
|
950.00 |
*13.53 |
- |
-32.42 |
0.102 |
22420 |
0.021 |
160.34 |
#32.27 |
|
1000.00 |
*13.85 |
- |
-27.42 |
0.093 |
23485 |
0.020 |
180.63 |
#33.63 |
References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- Stull, D.P., Shrader, S.Hl, and McDonald, R.A., J. Chem. Eng. Data (1959, 4, 311).
- Zwolinski, B.J. and Kudchadker, A.P., Chem. Rev. (1968, 68, 659).
- "Selected Values of Properties of Chemical Compounds," Data Project; Thermodynamics Research Center, Texas A&M University, College Station, TX (1984).
- Hurly, J.J., "Thermophysical Properties of Nitrogen Trifluoride, Ethylene Oxide, and Trimethyl Gallium, from Speed-of-Sound Measurements," Int. J. Thermophys. (in press.)
- Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517).
- Senftleben, H., Z. Angew. Phys. (1964, 17, 86).
Footnote:
# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
Contacts
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