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Index of Semiconductor Process Gases - Tungsten Hexafluoride
|
TUNGSTEN |
M.W. [1] 297.84 |
N.B.P [2] 290.25 K |
T.P [2] 275.0 K |
|
WF6 |
Pc [3] 4.57 MPa |
Tc [3] 452.7 K |
Vc [3] 0.1 m3/kmol |
Note: In the tables, #is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
|
T K |
$$ \frac{C_P^0(T)} {R} $$ |
Vapor Pressure kPa |
B(T) cm3· |
dB/dT·T cm3· |
C(T) cm6· |
dC/dT·T cm6· |
λ mW/ |
η µPa·s |
|---|---|---|---|---|---|---|---|---|
|
Esti- |
1%/0.1% |
1% |
Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference. |
10% |
10% |
|||
|
Ref- |
||||||||
|
205 |
11.84 |
0.19 |
-2001.6 |
5951.2 |
-4658932 |
47121716 |
- |
- |
|
210 |
12.00 |
0.34 |
-1864.5 |
5441.0 |
-3653771 |
36754361 |
- |
- |
|
215 |
12.16 |
0.58 |
-1741.8 |
4994.1 |
-2884907 |
28924191 |
#5.2 |
#14.17 |
|
220 |
+12.66 |
0.95 |
-1631.6 |
4600.8 |
-2291407 |
22949084 |
#5.4 |
#14.41 |
|
225 |
+12.78 |
1.53 |
-1532.2 |
4252.9 |
-1829413 |
18345717 |
#5.6 |
#14.64 |
|
230 |
+12.90 |
2.39 |
-1442.1 |
3943.9 |
-1466994 |
14767456 |
#5.7 |
#14.88 |
|
235 |
+13.03 |
3.62 |
-1360.3 |
3668.3 |
-1180656 |
11962851 |
#5.9 |
#15.11 |
|
240 |
+13.15 |
5.37 |
-1285.7 |
3421.6 |
-952936 |
9747555 |
#6.0 |
#15.35 |
|
245 |
+13.26 |
7.79 |
-1217.5 |
3199.8 |
-770738 |
7985050 |
#6.2 |
#15.58 |
|
250 |
+13.38 |
11.08 |
-1154.9 |
2999.9 |
-624150 |
6573288 |
#6.3 |
#15.81 |
|
255 |
+13.49 |
15.47 |
-1097.3 |
2819.0 |
-505611 |
5435305 |
#6.5 |
#16.05 |
|
260 |
+13.60 |
21.22 |
-1044.2 |
2654.8 |
-409306 |
4512569 |
#6.6 |
#16.28 |
|
265 |
+13.71 |
28.66 |
-995.0 |
2505.4 |
-330733 |
3760214 |
#6.8 |
#16.51 |
|
270 |
+13.82 |
38.15 |
-949.5 |
2369.0 |
-266380 |
3143590 |
#6.9 |
#16.75 |
|
275 |
+13.92 |
50.09 |
-907.2 |
2244.1 |
-213492 |
2635750 |
#7.1 |
#16.98 |
|
280 |
+14.03 |
64.94 |
-867.8 |
2129.6 |
-169892 |
2215594 |
#7.3 |
#17.21 |
|
285 |
+14.13 |
83.21 |
-831.1 |
2024.3 |
-133851 |
1866498 |
#7.4 |
#17.44 |
|
290 |
+14.23 |
105.45 |
-796.7 |
1927.2 |
-103990 |
1575285 |
#7.6 |
#17.67 |
|
295 |
+14.33 |
- |
-764.5 |
1837.5 |
-79201 |
1331447 |
#7.7 |
#17.91 |
|
300 |
+14.42 |
- |
-734.4 |
1754.5 |
-58589 |
1126565 |
#7.9 |
#18.14 |
|
305 |
+14.52 |
- |
-706.0 |
1677.4 |
-41432 |
953852 |
#8.0 |
#18.37 |
|
310 |
+14.61 |
- |
-679.3 |
1605.9 |
-27139 |
807815 |
#8.2 |
#18.60 |
|
315 |
+14.70 |
- |
-654.2 |
1539.2 |
-15228 |
683985 |
#8.3 |
#18.83 |
|
320 |
+14.78 |
- |
-630.4 |
1477.0 |
-5306 |
578711 |
#8.5 |
#19.06 |
|
340 |
+15.12 |
- |
-547.5 |
1265.9 |
20230 |
290555 |
#8.6 |
#19.29 |
|
360 |
+15.42 |
- |
-480.0 |
1101.2 |
31966 |
134118 |
#9.2 |
#20.21 |
|
380 |
+15.68 |
- |
-424.1 |
970.1 |
36670 |
47535 |
#9.8 |
#21.12 |
|
400 |
+15.92 |
- |
-377.1 |
863.9 |
37762 |
-659 |
#10.4 |
#22.03 |
|
420 |
+16.13 |
- |
-337.1 |
776.4 |
37023 |
-27161 |
#11.0 |
#22.93 |
|
440 |
*16.35 |
- |
-302.7 |
703.3 |
35400 |
-41155 |
#11.6 |
#23.83 |
|
450 |
*16.45 |
- |
-287.3 |
671.2 |
34428 |
-45187 |
#12.1 |
#24.73 |
|
460 |
*16.53 |
- |
-272.9 |
641.7 |
33403 |
-47843 |
#12.4 |
#25.17 |
|
480 |
*16.70 |
- |
-246.7 |
589.0 |
31305 |
-50243 |
#12.7 |
#25.62 |
|
500 |
*16.86 |
- |
-223.6 |
543.6 |
29249 |
-50142 |
#13.3 |
#26.51 |
|
550 |
*17.24 |
- |
-176.2 |
453.8 |
24678 |
-44989 |
#13.8 |
#27.39 |
|
600 |
*17.63 |
- |
-139.7 |
387.8 |
21064 |
-37951 |
#15.2 |
#29.58 |
|
650 |
*18.09 |
- |
-110.8 |
337.5 |
18293 |
-31353 |
#16.6 |
#31.75 |
|
700 |
*18.69 |
- |
-87.2 |
298.0 |
16181 |
-25746 |
#17.9 |
#33.89 |
|
750 |
*19.49 |
- |
-67.8 |
266.3 |
14567 |
-21142 |
#19.2 |
#36.01 |
|
800 |
*20.53 |
- |
-51.5 |
240.3 |
13326 |
-17405 |
#20.5 |
#38.10 |
|
850 |
*21.89 |
- |
-37.6 |
218.6 |
12365 |
-14375 |
#21.7 |
#40.16 |
|
900 |
*23.62 |
- |
-25.6 |
200.3 |
11616 |
-11914 |
#22.9 |
#42.20 |
|
950 |
*25.77 |
- |
-15.2 |
184.7 |
11027 |
-9906 |
#24.1 |
#44.21 |
|
1000 |
*28.41 |
- |
-6.1 |
171.2 |
10562 |
-8257 |
#25.3 |
#46.20 |
References:
- IUPAC; "Atomic Weights of the Elements 1993"; J. Phys. Chem. Ref. Data (24, 1561, 1995).
- Westrum, E.F., Pure and Appl Chem. (8, 187, 1964).
- Malyshev, V.V., Teplofizika Vysokikh Temperatur (11, 1010, 1973).
- Chase, M.W., "NIST-JANAF Thermochemical Tables, Fourth Edition", J. Phys. Chem. Ref. Data, Monograph 9 (1-1951, 1998).
- Hurly, J.J. "Thermophysical Properties of Gaseous Tungsten Hexafluoride from Speed-of-Sound Measurements", Int. J. Thermophys. (21, 1, 2000).
- Stull, D.R., "Vapor Pressure of Pure Substances", Ind. Eng. Chem. (39, 517, 1947).
Footnote:
#is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.
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