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Physical Measurement Laboratory / Sensor Science Division

Fluid Metrology Group

Index of Semiconductor Process Gases - Hydrogen

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HYDROGEN

M.W. [1]

2.0159

N.B.P [1]

20.390 K

T.P [1]

13.957 K

H2

Pc [1]

1.3150 MPa

Tc [1]

33.190 K

Vc [1]

0.066934 m3/kmol

Note: In the tables, # is used for properties obtained from estimation methods. * and + are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

T

K

 $$ \frac{C_P^0(T)} {R} $$

Vapor Pressure

MPa

B(T)

cm3·
mol-1

dB/dT·T

cm3·
mol-1

C(T)

cm6·
mol-2

dC/dT·T

cm6·
mol-2

λ

mW/
(m·K)

η

µPa·s

Estimated
Uncertainty

3%

-

Densities calculated should be good to 0.5% away from coexistence curve.

10%

4%

Reference

1

-

1

1

1

1

1

1

200

3.281

-

11.89

11.17

242.28

-

132.27

6.78

210

3.312

-

12.42

10.28

237.44

-

138.19

7.01

220

3.340

-

12.87

9.47

233.41

-

143.91

7.24

230

3.365

-

13.28

8.74

230.02

-

149.55

7.46

240

3.387

-

13.64

8.07

227.16

-

155.09

7.68

250

3.405

-

13.95

7.46

224.74

-

160.44

7.90

260

3.422

-

14.24

6.90

222.70

-

165.70

8.12

270

3.437

-

14.49

6.38

220.98

-

170.87

8.33

280

3.449

-

14.71

5.91

219.50

-

175.85

8.54

290

3.460

-

14.91

5.47

218.25

-

180.84

8.75

300

3.469

-

15.09

5.06

217.19

-

185.63

8.95

310

3.477

-

15.25

4.68

216.28

-

190.43

9.15

320

3.484

-

15.39

4.33

215.52

-

195.04

9.35

330

3.490

-

15.52

4.00

214.86

-

200.16

9.55

340

3.495

-

15.63

3.69

214.30

-

205.18

9.75

350

3.498

-

15.74

3.40

213.86

-

210.20

9.94

360

3.502

-

15.83

3.13

213.45

-

215.14

10.14

370

3.504

-

15.91

2.88

213.15

-

219.78

10.33

380

3.506

-

15.98

2.64

212.87

-

224.63

10.52

390

3.508

-

16.05

2.41

212.62

-

229.28

10.70

400

3.509

-

16.11

2.20

212.46

-

233.94

10.89

410

3.510

-

16.16

2.00

212.31

-

238.11

11.07

420

3.511

-

16.21

1.81

212.21

-

242.78

11.26

430

3.512

-

16.25

1.63

212.13

-

247.46

11.44

440

3.513

-

16.28

1.46

212.07

-

252.15

11.62

450

3.514

-

16.31

1.30

212.02

-

256.84

11.80

460

3.514

-

16.34

1.15

212.02

-

261.54

11.97

470

3.515

-

16.36

1.00

212.03

-

266.24

12.15

480

3.516

-

16.38

0.87

212.06

-

270.95

12.32

490

3.517

-

16.40

0.74

212.06

-

275.67

12.50

500

3.518

-

16.41

0.61

212.12

-

280.40

12.67

550

3.523

-

16.44

0.07

212.47

-

304.11

13.52

600

3.524

-

16.43

-0.37

212.94

-

327.99

14.34

650

-

-

-

-

-

-

-

-

700

-

-

-

-

-

-

-

-

750

-

-

-

-

-

-

-

-

800

-

-

-

-

-

-

-

-

850

-

-

-

-

-

-

-

-

900

-

-

-

-

-

-

-

-

950

-

-

-

-

-

-

-

-

1000

-

-

-

-

-

-

-

-


References:

  1. Lemmon, E.W. and McLinden, M.O., NIST Standard Reference Database 23: NIST Reference Fluid Thermodynamic and Transport Properties, Version 7.0, National Institute of Standards and Technology, Standard Reference Data Program, Gaithersburg, 2001.

Footnote:

# is used for properties obtained from estimation methods.
* and + are used to distinguish between differing data sets within a single column.

Chemistry, Electronics, Semiconductors, Standards, Reference data and Reference materials

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Created December 30, 2009, Updated March 1, 2023