Tea, N.
, Milanovic, V.
, Zincke, C.
, Suehle, J.
, Gaitan, M.
and Zaghloul, M.
(1997),
Hybrid Postprocessing Etching for CMOS-Compatible MEMS, Journal of Microelectromechanical Systems
(Accessed June 30, 2024)
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Hybrid Postprocessing Etching for CMOS-Compatible MEMS
Published
Author(s)
N. H. Tea, V. Milanovic, C. A. Zincke, , ,
Citation
Journal of Microelectromechanical Systems
Volume
6
Issue
4
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 30, 1997, Updated October 12, 2021