Cassard, J.
, Read, D.
and Gaitan, M.
(1996),
Analysis of Fixed-Fixed Beam Test Structures, Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II, Austin, TX, USA
(Accessed December 26, 2024)
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Analysis of Fixed-Fixed Beam Test Structures
Published
Author(s)
, ,
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II
Volume
2880
Conference Dates
October 14-15, 1996
Conference Location
Austin, TX, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1996, Updated October 12, 2021