Marchiando, J.
, Kopanski, J.
and Albers, J.
(1999),
Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements, Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA
(Accessed November 8, 2024)
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Limitations of the Calibration Curve Method for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published
Author(s)
, ,
Proceedings Title
Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Conference Dates
March 28-31, 1999
Conference Location
Research Triangle Park, NC, USA
Pub Type
Conferences
Citation
Issues
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Created May 31, 1999, Updated October 12, 2021