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On-silicon Metrology
Summary
Leveraging traditional semiconductor circuits on silicon chips offers new possibilities for advanced measurement capabilities. Small feature sizes allow for high sensitivity, low-noise characterization. Large-scale circuit design allows for parallel characterization of many material samples (devices) at once, providing immediate insight into statistical properties of growth and fabrication processes in the industrially-relevant large N limit. The use of silicon chips as metrology platforms, however, comes with its own complications. Naïve approaches are inflexible and highly application specific. Compounded with the high cost of chip design and fabrication, this makes for a daunting enterprise.
Description
Our On-silicon Metrology program works to develop complementary metal-oxide semiconductor (CMOS) chips with favorable properties for electronic device characterization in a flexible framework that maximizes the utility of each given design. We also develop highly modular and reusable platforms that make experimental design and control in these chip-scale measurement systems accessible to researchers across many disciplines. We work with both industry and academia to create tightly integrated measurement platforms for analog memory systems and artificial intelligence accelerators.
