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PUBLICATIONS

Accuracy and Resolution of Nanoscale Strain Measurement Techniques

Published

Author(s)

William A. Osborn, Lawrence H. Friedman, Mark D. Vaudin, Stephan J. Stranick, Michael S. Gaither, Justin M. Gorham, Victor H. Vartanian, Robert F. Cook
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD
Pub Type
Conferences

Keywords

Strain Measurement, Stress Measurement, CRM, EBSD, XRD, SiGe, Reference Material
Semiconductors, Ceramics and Nanometrology

Citation

Osborn, W. , Friedman, L. , Vaudin, M. , Stranick, S. , Gaither, M. , Gorham, J. , Vartanian, V. and Cook, R. (2013), Accuracy and Resolution of Nanoscale Strain Measurement Techniques, Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD (Accessed January 2, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 26, 2013, Updated February 19, 2017