Cassard, J.
, Read, D.
and Gaitan, M.
(1996),
Analysis of Fixed-Fixed Beam Test Structures, Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II, Austin, TX, USA
(Accessed July 1, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Analysis of Fixed-Fixed Beam Test Structures
Published
Author(s)
, ,
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II
Volume
2880
Conference Dates
October 14-15, 1996
Conference Location
Austin, TX, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1996, Updated October 12, 2021