Green, M.
, Chang, K.
, Takeuchi, I.
and Chikyow, T.
(2006),
A Combinatorial Study of Metal Gate/HfO2 MOSCAPS, ECS Transactions, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854327
(Accessed October 31, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
A Combinatorial Study of Metal Gate/HfO2 MOSCAPS
Published
Author(s)
, K S. Chang, Ichiro Takeuchi, T Chikyow
Citation
ECS Transactions
Volume
3
Issue
3
Pub Type
Journals
Download Paper
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created September 1, 2006, Updated February 19, 2017