Linholm, L.
(1981),
The design, testing, and analysis of a comprehensive test pattern for measuring CMOSSOS process performance and control:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-66
(Accessed November 8, 2024)
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The design, testing, and analysis of a comprehensive test pattern for measuring CMOSSOS process performance and control:
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- NBS SP 400-66
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NBS SP 400-66
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NIST Pubs
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Created January 1, 1981, Updated May 19, 2023