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PUBLICATIONS

Double-level metallization ::annual report for October 1, 1985 to September 30, 1986

Published

Author(s)

G P Carver, D B Novotny, R Hershey, J E Luther
Citation
- NBS IR 87-3579
Report Number
NBS IR 87-3579
Pub Type
NIST Pubs

Download Paper

DOI Link

Citation

Carver, G. , Novotny, D. , Hershey, R. and Luther, J. (1987), Double-level metallization ::annual report for October 1, 1985 to September 30, 1986, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.87-3579 (Accessed December 26, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1987, Updated May 19, 2023