Jerke, J.
, Croarkin, M.
and Varner, R.
(1982),
Interlaboratory study on linewidth measurements for antireflective chromium photomasks:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-74
(Accessed July 27, 2024)
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Interlaboratory study on linewidth measurements for antireflective chromium photomasks:
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, ,
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- NBS SP 400-74
Report Number
NBS SP 400-74
Pub Type
NIST Pubs
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Created January 1, 1982, Updated May 19, 2023