Cassard, J.
, Parameswaran, M.
, Zaghloul, M.
and Gaitan, M.
(1992),
Methodology for the Computer-Aided Design of Silicon Micromachined Devices in a Standard CMOS Process, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed July 1, 2024)
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Methodology for the Computer-Aided Design of Silicon Micromachined Devices in a Standard CMOS Process
Published
Author(s)
, M. Parameswaran, ,
Citation
NIST Interagency/Internal Report (NISTIR) -
Volume
4865
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created April 30, 1992, Updated October 12, 2021