Lindstrom, R.
, Simons, D.
, Bennett, R.
, Benbalagh, R.
, MacDonald, B.
, Chew, A.
, Gehre, D.
, Hasegawa, H.
, Hitzman, C.
, Ko, J.
, Magee, C.
, Montgomery, N.
, Peres, P.
, Ronsheim, P.
, Yoshikawa, S.
, Schuhmacher, M.
, Stockwell, W.
, Sykes, D.
, Tomita, M.
, Toujou, F.
and Won, J.
(2006),
Round-Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS, Applied Surface Science
(Accessed July 17, 2024)
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Round-Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS
Published
Author(s)
, , , R. Benbalagh, , A. Chew, D. Gehre, H Hasegawa, C. Hitzman, J. Ko, C W. Magee, N. Montgomery, P. Peres, P. Ronsheim, S. Yoshikawa, M. Schuhmacher, W. Stockwell, D. Sykes, M. Tomita, F. Toujou, J. Won
Citation
Applied Surface Science
Volume
252
Issue
19
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 1, 2006, Updated February 17, 2017