U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Search Publications by: Richard A. Allen (Fed)

Search Title, Abstract, Conference, Citation, Keyword or Author
Displaying 101 - 125 of 133

Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries

December 31, 1998
Author(s)
Michael W. Cresswell, Nadine Guillaume, Richard A. Allen, William F. Guthrie, Rathindra Ghoshtagore, James C. OwenI II, Z. Osborne, N. Sullivan, Loren W. Linholm
This paper describes methods for the extraction of sheet resistance from V/I measurements made on four-terminal sheet resistors incorporated into electrical linewidth test structures patterned with non-planar geometries in monocrystalline silicon-on

Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference-Material Applications

May 1, 1998
Author(s)
Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Rathindra Ghoshtagore, Loren W. Linholm, J. J. Sniegowski
The physical widths of reference features incorporated into electrical linewidth test structures patterned in films of mono-crystalline silicon have been determined from Kelvin voltage measurements. The films in which the test structures are patterned are