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Search Publications by: Thomas A. Germer (Fed)

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Displaying 226 - 250 of 384

Measurement of the 100 nm NIST SRM 1963 by Laser Surface Light Scattering

November 1, 2002
Author(s)
Thomas A. Germer, George W. Mulholland, Jae Hyun Kim, S H. Ehrman
Accurate sizing of particles deposited on surfaces is important for the semiconductor, optical, and data storage industries. The recent availability of accurate light scattering models for non-ideal conditions enables the determination of particle size

Measurement of Lithographic Overlay by Light-Scattering Ellipsometry

September 1, 2002
Author(s)
Thomas A. Germer
We demonstrate a measurement of lithographic overlay using light scattering ellipsometry. In the limit of small amplitude surfactopography, the polarization of light scattered by the two interfaces of a dielectric film can be decomposed into the roughness

Polarized Light Scattering by Dielectric and Metallic Spheres on Silicon Wafers

September 1, 2002
Author(s)
Jae H. Kim, S H. Ehrman, George W. Mulholland, Thomas Germer
The Polarization and intensity of light scattered by monodisperse polystyrene latex and copper spheres, with diameters ranging from 92 to 218 nm, deposited on silicon substrates were measured with 442-, 532-, and 633-nm light. The results are compared with

Light Scattering by Slightly Nonspherical Particles on Surfaces

July 1, 2002
Author(s)
Thomas A. Germer
We investigate the shape dependence of the scattering by dielectric and metallic particles on surfaces by considering particles whose free-space scattering properties are nearly identical. The scattering by metallic particles is very strongly dependent

Size-Monodisperse Metal Nanoparticles Via Hydrogen-Free Spray Pyrolysis

April 3, 2002
Author(s)
Jung Hyeun Kim, Thomas A. Germer, George Mulholland, S H. Ehrman
Pure copper nanoparticles were produced using a co-solvent approach avoiding use of hydrogen or other reducing gas. Compared with the particles formed without the co-solvent, the addition of alcohol has a significant effect in preventing oxidation, which

Colorimetric Characterization of Pearlescent Coatings

January 1, 2002
Author(s)
Maria E. Nadal, Thomas A. Germer
This paper descirbes recent developments at the National Institution of Standards and Technology in the colorimetric characterization of pearlescent coatings. The goal of this research is to develop standard measurement protocols for the accurate color