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Search Publications by: Yicheng Wang (Fed)

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Displaying 51 - 75 of 129

Rate Constants for Unimolecular Decomposition of SF 6 -

November 21, 2001
Author(s)
Yicheng Wang, R. Champion, I. V. Dyakov, B. Peko
Insulating gas mixtures containing SF 6 have been promoted to serve as replacements for pure SF 6 in order to reduce SF 6 atmospheric emission. It has been argued that some synergism may be achieved by choosing proper buffer gases in mixtures with SF 6

Collisional Decomposition of SF 6

September 1, 2000
Author(s)
R. Champion, I. V. Dyakov, Yicheng Wang
Insulating gas mixtures containing SF 6 have been promoted to serve as replacements for pure SF 6 in order to reduce SF 6 atmospheric emission. It has been argued that some synergism may be achieved by choosing proper buffer gases in mixtures with SF 6

Inductively Coupled Plasmas in Low Global Warming Potential Gases

August 1, 2000
Author(s)
Amanda N. Goyettes, Yicheng Wang, James K. Olthoff
Many high density discharges used in microelectronics fabrication use fluorocarbon gases with coincidentally high global-warming potentials (GWPs). We have determined the identities, fluxes, and energy distributions of ions produced in high density