Djordjevic, S.
, Roberts, J.
and Olthoff, J.
(1996),
Spatial and Time Characteristics of Low Temperature RF Plasmas for Materials Processing, Journal of Magnetohydrodynamics and Plasma Research, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32421
(Accessed January 6, 2025)
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Spatial and Time Characteristics of Low Temperature RF Plasmas for Materials Processing
Published
Author(s)
Sophie Djordjevic, ,
Citation
Journal of Magnetohydrodynamics and Plasma Research
Volume
7
Issue
1
Pub Type
Journals
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1995, Updated October 12, 2021