Lee, J.
, Park, J.
, Venables, D.
, Krause, S.
and Roitman, P.
(1993),
Stacking Fault Pyramid Formation and Energetics in Silicon-on-Insulator Material Formed by Cycles of Oxygen Implantation and Annealing, Applied Physics Letters
(Accessed July 27, 2024)
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Stacking Fault Pyramid Formation and Energetics in Silicon-on-Insulator Material Formed by Cycles of Oxygen Implantation and Annealing
Published
Author(s)
J. H. Lee, J Park, D. Venables, S. J. Krause,
Citation
Applied Physics Letters
Volume
63
Issue
24
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 30, 1993, Updated October 12, 2021