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Search Publications by: Dale E. Newbury (Assoc)

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Displaying 101 - 125 of 216

The Development of Microcalorimeter EDS Arrays

November 1, 2002
Author(s)
Kent D. Irwin, James A. Beall, Steven Deiker, Gene C. Hilton, L. King, Sae Woo Nam, Dale Newbury, Carl D. Reintsema, John A. Small, Leila R. Vale
High-energy-resolution cryogenic microcalorimeters are a powerful new tool for x-ray microanalysis. With demonstrated energy resolution 20 times better than with conventional semiconductor EDS, microcalorimeters are useful in applications such as nanoscale

Energy Dispersive X-ray spectromety by Microcalorimetry for the SEM

January 1, 2002
Author(s)
Dale E. Newbury, David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, John A. Small, John M. Martinis
Analytical x-ray spectrometry for electron beam instruments has been significantly advanced with the development of the NIST microcalorimeter energy dispersive x-ray spectrometer (mcal EDS). The mcal EDS operates by measuring the temperature rise when a

Progress Towards Arrays of Microcalorimeter X-ray Detectors

September 1, 2001
Author(s)
Sae Woo Nam, David A. Wollman, Dale Newbury, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Steven Deiker, Norman F. Bergren, John M. Martinis
The high performance of single-pixel microcalorimeter EDS (υcal EDS) has been shown to be very useful for a variety of microanalysis cases. The primary advantage of υcal EDS over conventional EDS is that factor of 25 improvement in energy resolution (3 eV

Low Voltage Microanalysis using Microcalorimeter EDS

January 1, 2001
Author(s)
David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Norman F. Bergren, Steven Deiker, John M. Martinis, Martin Huber, Dale Newbury
We present the current performance of the prototype high-resolution microcalorimeter energy-dispersive spectrometer (υcal EDS) developed at NIST for x-ray microanalysis. In particular, the low-energy υcal EDS designed for operation in the energy range from

Superconducting Transition-Edge-Microcalorimeter X-ray Spectrometer with 2 eV Energy Resolution at 1.5 keV

December 31, 2000
Author(s)
David A. Wollman, Sae Woo Nam, Dale Newbury, Gene C. Hilton, Kent D. Irwin, Norman F. Bergren, Steven Deiker, David A. Rudman, John M. Martinis
We describe the operation and performance of a prototype microcalorimeter ?energy-dispersive? (nondispersive) x-ray spectrometer (mcal EDS) developed at NIST for use in x-ray microanalysis and x-ray astronomy. The low-energy microcalorimeter detector

Measures for Spectral Quality in Low-Voltage X-Ray Microanalysis

November 1, 2000
Author(s)
Dale E. Newbury
Characteristic x-ray production with energetic electrons depends strongly on the overvoltage, the ratio of the incident beam energy to the critical excitation energy for the atomic species of interest. Low voltage x-ray microanalysis (beam energy < 5 keV)

Microcalorimeter Energy Dispersive X-ray Spectrometer for Low Voltage Microanalysis

November 1, 2000
Author(s)
David A. Wollman, John M. Martinis, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Norman F. Bergren, Steven Deiker, Martin Huber, Dale Newbury
Improved x-ray detector technology continues to be a critical metrological need in the semiconductor industry for contaminant particle analysis 1,2 and for high-spatial-resolution x-ray microanalysis using low-beam-voltage field-emission scanning electron

Microcalorimeter EDS: Benefits and Drawbacks

August 1, 2000
Author(s)
David A. Wollman, Dale Newbury, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Steven Deiker, Norman F. Bergren, John M. Martinis
The commercial introduction of high-count-rate, near-room-temperature silicon drift detectors (presently available) and high-energy-resolution cryogenic microcalorimeters (forthcoming) is an exciting development in x-ray microanalysis, in which detector